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Extension of the lifetime of tantalum filaments in the hot-wire (Cat) 3 Chemical Vapor Deposition process

Author: Knoesen, D ; Arendse, C ; Halindintwali, S ; Muller, T Date: Jan 2008 One of the prime components of a hot-wire (Cat) Chemical Vapor Deposition system is the filament used to pyro-catalytically crack the gases like silane. Burnt out tantalum filaments were studied to determine the possible improvement of lifetime ... Read more

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Browsing by Subject "Silicide"

Browsing by Subject "Silicide"

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