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Structural evolution of a Ta-filament during hot-wire chemical vapour deposition of Silicon investigated by electron backscatter diffraction

Author: Oliphant, CJ ; Arendse, CJ ; Prins, SN ; Malgas, GF ; Knoesen, D Date: Mar 2012 In this study we investigate the structural changes of a burnt-out tantalum filament that was operated at typical hydrogenated nanocrystalline silicon synthesis conditions in our hot-wire chemical vapour deposition chamber. Scanning electron ... Read more

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Browsing by Subject "Filament"

Browsing by Subject "Filament"

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