Author:Scriba, Manfred R; Arendse, CJ; Harting, M; Britton, DTDate:Jan 2008The viability of producing silicon nanoparticles using the HWCVD process is investigated. A system is assembled and particles are produced from silane at pressures between 0.2 – 48 mbar, with hydrogen dilutions of 0-80%, at a total flow rate ...Read more
